Fig. 1 Diagram of a 13.56-MHz-RF-plasma rotating reactor: 1—reservoirs; 2—valves; 3—flow-meters; 4,10—ferrofluidic feed-through; 5,9—connecting rubber and stainless steel rings; 6—semicylindrical copper electrodes; 7—Pyrex glass chamber; 8—13.56-MHz RF power supply and matching network assembly; 11—gate valve; 12—electric engine; 13—transmission system

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